Measuring system, measuring arrangement and method for determining measuring signals during a penetration movement of a penetration body into a surface of a test body

ABSTRACT

The invention relates to a measuring System, a measuring arrangement and a method for detecting measuring signals during a penetration movement of a penetration body (41) into a surface of a test body (14), in particular for hardness measurement or for determining the Scratch resistance of the surface of the test body (14), or for detecting measuring signals during a scanning movement of the penetration body (41) on the surface of the test body (14), in particular for determining the surface roughness, comprising a housing (47) provided with a power generating device (44) which is operatively connected to a penetration body (41) for generating a displacement movement of the penetration body (41) along a displacement axis (48) of the penetration body (41) and which actuates a penetration movement of the penetration body (41) into the surface to be examined of the test body (14), or which positions the penetration body (41) on the surface of the test body (14) for scanning, and further comprising at least one first measuring device (78) for measuring the penetration depth in the surface of the test body (14) or a displacement movement of the penetration body (41) along its displacement axis (48) during a scanning movement on the surface of the test body (14), wherein the power generating device (44) actuates the displacement movement of the penetration body (41) by means of a magnetic force.

The invention relates to a measuring device, as well as a measuringarrangement and a method for detecting measuring signals during apenetrating movement of an indenter into a surface of a specimen, aswell as for determining the scratch resistance of the surface of thespecimen, as well as for determining the surface roughness of thespecimen.

From DE 699 17 780 T2, a measuring means as well as a method formeasuring the scratch resistance of a surface of a specimen are known,which comprise a measuring table for receiving a specimen as well as ahandling means for transferring the measuring device from an initialposition into a measuring position. In addition, a control is provided,through which the measuring device, after having placed a specimen onthe surface to be tested, actuates both a displacement movement of themeasuring table along an axis as well as a penetrating movement of theindenter is actuated, such that, during the displacement movement of themeasuring table, the indenter penetrates the surface of the specimen.

For the actuation of the penetrating movement of the indenter afterbeing placed on to the surface of the specimen, the measuring devicecomprises a piezoelectric actuator which acts on a first retainingplate, which plate is movable upwards and downwards by means of two leafspring pairs. Said holding plate receives another plate, which, in turn,is movably-mounted, upwards and downwards, by means of two leaf springpairs, with said plate having the indenter arranged therein. A measuringdevice is provided between the holding plate and the plate that receivesthe indenter, said measuring device measuring the penetration path. Inaddition, a measuring device is arranged next to it, for determining thenormal force.

This measuring device comes with the disadvantage that, between thepiezoelectric actuator and the penetrating tip, a structure that is ofheavy and elaborate construction is provided by the holding plate aswell as by the plate receiving the indenter, by the leaf spring pairs ineach case selected for the mounting. Not only a large construction spaceis thereby required, but the piezoelectric drive is to be designedcorrespondingly large, in order to provide the force for actuating thepenetrating movement. Furthermore, this measuring device is sluggish,owing to the elaborate constructive structure. Furthermore, themeasuring device, due to the actuation of the indenter by means of ahigh-precision actuator, is expensive.

The object underlying the invention is to create a measuring device fordetecting measuring signals during a penetration movement of an indenterinto a surface of the specimen, in particular for determining thescratch resistance of the surface or for detecting measuring signalsduring a scanning movement of an indenter on the surface of a specimen,in particular for determining the surface roughness of the specimen, aswell as providing a measurement device and a method for determiningmeasuring signals during a penetrating movement of the indenter, inparticular for determining the scratch resistance of the surface of thespecimen, or during a scanning movement of the indenter, whereby anincreased measurement precision and reduced costs are enabled.

The object underlying the invention is achieved by a measuring devicewith an indenter and a force generation means, with which the indenteris operatively coupled, in which the indenter penetrates into a surfaceto be measured of the specimen or scans a surface to be measured of thespecimen. At least one measuring means is provided for measuring thepenetration depth and the surface roughness. The penetration movement ofthe indenter or the scanning movement of the indenter can be driven bymeans of the force generation means using magnetic force. The use of asuch force generation means, which includes a drive means and a magnetictransmission means, in which the penetration movement or scanningmovement of the indenter is driven by means of a magnetic force, has theadvantage, that a physical decoupling of drive means and indenter isgiven. This allows for a frictionless transmission of force from thedrive onto the indenter. In addition, a change in magnetic force isdirectly translated into a penetration movement of the indenter into thesurface of the specimen or into a contact force for a scanning movementof the indenter. The increase of magnetic forces thus means a directincrease of the force for the indenter and vice versa. Through theconfiguration of the force generation means with a magnetic force, ahysteresis-free driving of the penetration movement of the indenter isthus allowed for. In addition, temperature impacts can be excluded bymeans of the force generation means. Moreover, further disadvantageousimpacts are also excluded, as the magnetic force cannot be compressed.Through the force transmission activatable without hysteresis, an exactsetting and/or high repeatability of a penetration force or contactforce for a scanning movement of the indenter can be settable. Inaddition, an arrangement of a force generation means, reduced in termsof mass, can be achieved. Also, such a force generation means comes withthe advantage that a once-set magnetic force can be kept constant.

The magnetic transmission means of the measuring device preferablycomprises a first and a second magnetic pole, which are arranged spacedto and opposite one another, wherein the magnetic poles are oriented onewith respect to the other with the same poles. Preferably, permanentmagnets are provided. The first and second magnetic poles can beconfigured by one or multiple permanent magnets, which can be orientedtogether or spaced from one another. E.g. two magnets spaced from oneanother or e.g. three permanent magnets arranged on a circle can form afirst and/or second magnetic pole. This way, a repulsive force can begenerated between the first and second magnetic poles. As the respectivemagnetic fields of the magnetic poles can not be compressed, a definedincrease of force can be produced and achieved with increasing decreaseof the distance, which increase is provided for a displacement movementof the indenter.

It is preferably provided for the second magnetic pole to be provided onthe transmission element receiving the indenter on the opposite endthereof, wherein the transmission element is guided, inside the housing,displaceably along a travel axis. The travel axis is preferably orientedperpendicular to a base plate of the housing, or the travel axis ispreferably located in the axis of the indenting movement of theindenter. Here, a magnetic force acting lengthwise to the drive elementcan be translated into a displacement movement along the longitudinalaxis of the transmission element. This allows for an arrangement and aforce transmission free from any losses.

The first magnetic pole of the magnetic force transmission means ispreferably connected with the drive means, through which a displacementmovement of the first magnetic pole along a travel axis is driven. Thistravel axis may be located in the axis of the indenting movement of theindenter or parallel thereto. A displacing movement of the firstmagnetic pole directly towards the second magnetic pole is therebydriven, wherein, in particular with a congruence of the travel axes, aparticularly suitable, in particular non-tilt transmission of force ofthe magnetic force from the first magnetic pole onto the second magneticpole is given. Alternatively, the travel axis of the first magnetic polecan be oriented perpendicular to the axis of the indenting movement ofthe indenter. The travel axis of the indenter is usually orientedperpendicular to the surface of the object to be measured and is thuslypreferably located in the vertical. In the alternative embodiment, thetravel axis of the first magnetic pole thusly lies in the horizontal.Such an arrangement has the advantage that a low-profile measuringdevice can be created.

It is preferably provided that, by a displacing movement of the firstmagnetic pole in the direction towards the second magnetic pole, thedisplacing movement of the indenter in the direction towards thespecimen and a penetration force into the specimen or a contact forcefor scanning the surface of the specimen can be adjusted. Simplerelationships are given thereby, wherein merely by a feed motion of thefirst magnetic pole, the driving of the indenter via the second magneticpole is enabled.

It is preferably provided, that the transmission element is of pin-typeor tubular design. A rigid configuration of the transmission element aswell as a lightweight embodiment can thereby be achieved.

Preferably, the transmission element is displaceably received by meansof a guide, said guide being fixed to a holding device in the housing.This guide preferably comprises at least two resilient elements that arespaced apart from one another, in particular two leaf spring elementsspaced in parallel to one another, or two pressure diaphragm elementsspaced in parallel to one another, which are guided in a manner to bedisplaceable in the travel axis of the drive device or are deflectablealong the travel axis. The leaf-spring elements or pressure diaphragmelements engage, on the one hand, on the transmission element and are,with the opposite end thereof, held on a holding device of the housing.

The guide is preferably made from non-magnetizable materials.

According to a first embodiment, it can be provided that the leaf springelements or pressure diaphragm elements of the holding device are heldin a tightly-clamped manner. This allows for the leaf spring elements orthe pressure diaphragm elements to be adaptable to the respective taskand/or size of the measuring device, in a simple manner, by exchangingthem. In addition, a modular construction can be brought about.

Alternatively, it can be provided that the holding device and the leafspring device are formed as one piece and preferably, the leaf springelements are produced by erosion or ultrafine processing. Such anarrangement allows for a compact design, in which simultaneously adisplacement movement of the leaf spring elements is limited by anintermediate body of the holding device extending between the leafspring element.

The spring leaf elements preferably comprise a clamping region assignedto the holding device and, opposite thereto, a receiving region actingon the transmission pin as well as a spacer portion located thereinbetween, wherein the clamping region and the spacer portion, as well asthe receiving region and the spacer portion are respectively connectedto one another by means of a flexure bearing. This arrangement comeswith the advantage, that the clamping region and the receiving regioncan substantially remain in parallel orientation upon a deflection ofthe leaf spring element. Advantageously, it is provided that the flexurebearings are configured as hinges, being resilient in one spatialdirection and being rigid in the other two spatial directions. Thelatter can be reduced in thickness with respect to the clamping region,the receiving region and the spacer portion. Owing to the thickness ofthe flexure bearings, the force to be applied can be destined fordeflecting the leaf spring elements.

One advantageous configuration of the flexure bearings in the leafspring elements provides that the latter extend over the entire width ofthe leaf spring element and preferably comprise at least one slotrecess. By such a slot recess, in turn, the force for a deflectingmovement can be adaptable in a simple manner and can be reduced.

The housing of the measuring device preferably comprises a baseplatewith a recess, along the longitudinal axis of which the displacementmovement of the indenter is directed, wherein the indenter can be guidedthrough the opening and can be positioned in a position protruding tothe outside with respect to the base plate. This way, a drive shaft ofthe drive device for driving the displacing movement of the indenter aswell as a longitudinal axis of the transmission element receiving theindenter, can be located on a common axis. This allows for an immediateand direct driving of the displacing movement of the indenter.

Preferably, it is provided that the guide holds the transmission elementand the indenter arranged thereon in an initial position, in which theindenter is arranged set back towards the inside with respect to a lowerside of the housing, which is oriented towards the specimen. This comeswith the advantage of providing protection against damage of theindenter. Preferably, in this initial position, the transmission elementis kept in balance with the magnetic pole provided thereon in thereceiving element and the opposite indenter. The indenter is preferablypositioned inside an opening in the base plate of the housing.Furthermore, an attachment ring can also be positioned within saidopening, which ring comprises a through hole. The attachment ring canprotrude with respect to the lower side of the housing, however, theindenter is preferably set back towards the inside also with respect toan attachment surface of the attachment ring, in the initial position.

Preferably a first measuring means, in particular a distance sensor, isprovided adjacent to the recess in the base plate of the housing, whichdevice comprises a measuring probe being assigned to an internal end ofthe indenter. During a displacing movement or a penetrating movement ofthe indenter into the specimen, the actual displacing movement canthereby be detected and, via the evaluation of the hardness of thespecimen or of a scratch or also for determining the surface roughness,can be detected and can be forwarded to a control device.

The drive means of the force generation means is advantageously providedon a cover element of the housing provided opposite the base plate,which element comprises at least one length-adjustable drive element,preferably located in a travel axis of the displacing movement of theindenter. This comes with the advantage, that the induction a force forgenerating a displacing movement finds itself in the travel axis of theindenter, so that losses can be minimized.

The drive element receives the first magnetic pole at an end directedtowards the transmission pin. This comes with the advantage that, by adefined displacing movement of the drive element, which is assigned tothe cover element, a targeted change in distance to the opposite,respectively second magnetic pole can be set, that is, the increasingdecrease of the distance goes along with an increase of the magneticforce.

The drive element is, for example, configured as a drive spindle andpreferably guided, in a twist-proof manner, by means of a guide, whereinsaid guide in particular is provided on the cover element. The driveelement can alternatively be configured as a telescopic spindle. Thedisplacing movement of the drive element is driven by means of a rotarydrive and a drive motor. Preferably, an electric drive motor isprovided, which motor drives a rotary drive, in order to achieve adefined feed motion of the drive element and preferably to decode thefeed motion in order to be able to exactly establish the travel path.

Alternatively to the electric drive, a pneumatic, hydraulic orelectromagnetic drive can also be provided.

Advantageously, the rotary drive is configured as a toothed belt driveand drives the drive element that is twist-proof due to the guide. Aconfiguration of simple construction is thereby provided. Due to thepitch of a thread on the drive spindle or of the threads from thetelescopic spindle, a defined increase of a displacing movement can beset depending on the rotation.

A further alternative configuration of the measuring device providesthat the travel axis of the drive element is oriented perpendicular tothe travel axis of the indenter, and the drive element drives adisplacing movement of the at least one first magnetic pole along thetravel axis perpendicular to the travel axis of the indenter, until saidfirst magnetic pole is transferred into a position with a partialoverlap or a congruent position tow the second magnetic pole.Alternatively, it can be provided that the first magnetic pole is formedby two or more permanent magnets, which simultaneously is transferrableinto a position with a partial overlap, or into a congruent positionwith respect to a corresponding number of permanent magnets forming thesecond magnetic pole. Insofar as, for example, two permanent magnetsform a first magnetic pole, the second magnetic pole is likewise formedby two permanent magnets. By a simultaneous displacing movement of thepermanent magnets forming the first magnetic pole, from a region outsideof the magnetic field of the permanent magnets forming the secondmagnetic pole. into a position with a partial overlap or in a congruentarrangement, a uniform impact of the force field onto the two permanentmagnets of the second magnetic pole is achieved. A non-tilt driving of adisplacing movement of the transmission element can thereby be achievedalong the travel axis of the indenter.

The drive element for the above-described alternative configuration ofthe measuring device preferably includes a pair of drive elementsassigned to one another, in particular toothed racks, which areactuatable with a rotary drive perpendicular to the travel axis of theindenter and preferably are displaceable alongside guide rails. Saidguide rails are oriented perpendicular to the displacing movement of theindenter, in particular perpendicular to the travel axis of thetransmission element. On each drive element, in particular on eachtoothed rack a permanent magnet is provided, which together form a firstmagnetic pole. By such an arrangement, both drive elements, inparticular toothed racks, can be driven with a drive wheel, whereby asynchronous displacing movement of the permanent magnets of the firstmagnetic pole, for the partial overlap or for congruent arrangement ofthe permanent magnets of the second magnetic pole, is driven.Advantageously, a drive shaft of the drive wheel of the two driveelements can be oriented slightly outside an angle of 90° to the traveldirection of the drive elements. A play-free adjustment can thereby beachieved.

Furthermore, it is preferably provided in the alternative embodiment,that a receiving device is provided on the transmission element, whichdevice receives at least one permanent magnet arranged in the travelaxis or which receives two or more permanent magnets at the samedistance to the travel axis of the transmission element for forming thesecond magnetic pole. Sufficient space is thereby provided, for examplein order to move two permanent magnets of the second magnetic pole, edisplaceable in the opposite of each other, towards the permanentmagnets of the second magnetic pole and to position them in a congruentarrangement for maximum transmission of force.

Advantageously, the drive movement of the drive element is monitoredwith a third measuring means, in particular a rotary encoder. Byknowledge of the magnetic flux of the magnetic poles, the increasingforce can be determined with increasing decrease of the distance betweenthe magnetic poles. Through this rotary encoder, it can be exactlydetected, to change the distance of the magnetic poles, and thus, theforce exerted onto the indenter, so that, by the control means, due tothe travel path of the drive element, the force acting on the surface ofthe specimen can be used as an evaluation parameter.

Another preferred configuration of the measuring device provides that afourth measuring device, in particular a force sensor, is providedbetween the drive element and the magnetic pole arranged thereon. Anadditional monitoring of the force acting on the opposite magnetic poleon the transmission pin can be detected and/or monitored by the magneticpole of the drive element.

Another preferred configuration provides that a vibration damping deviceis assigned to the magnetic pole arranged on the transmission element.Thereby, undesired lifting movements of the indenter, during a measuringwith this measuring device can be reduced or prevented. This is inparticular advantageous when determining the scratch resistance of asurface of the indenter.

According to a first embodiment, the vibration damping device ispreferably configured by an enclosure, in particular a tube, made of aferromagnetic material, which enclosure surrounds the second magneticpole arranged on the transmission element, wherein the magnetic pole, inan initial position of the indenter, is least partially plunged into thevibration damping device. With increasing displacing movement of theindenter towards the specimen, the second magnetic pole is slightlymoved out with respect to the vibration damping device, that is, that ina possible lift-off movement of the indenter from the specimen, aplunging of the magnetic pole into the vibration damping device results,which movement causes, an increase of the magnetic force and thus acounteracting of the plunging movement.

According to a further preferred embodiment of the measuring device, itis provided that a compensating element is provided between the two leafspring elements spaced apart parallel to one another, which element ismounted on the holding device and protrudes, with one end thereof, intothe transmission element, on which another leaf spring element isprovided extending in the direction towards an end of the transmissionpin receiving the magnetic pole and which is fastened thereto. Throughthis leaf spring element, a deflection movement of the transmissionelement can be counteracted in a displacing movement of the specimenrelative to the indenter upon the determining of the scratch resistance.In addition, through this arrangement, an orientation of thetransmission element in a basic position or initial position, within thehousing of the measuring device, can also be achieved.

One preferred embodiment of the compensating element provides, that thelatter is mounted on the holding device by means of a clamping strapmount. The levelling of the transmission pin can thereby be achieved ina basic or initial position.

Another preferred configuration of the measuring device provides, thatthe leaf spring element or pressure diaphragm element, arranged at adistance to the base plate, is tightly clamped in the holding device andthat the leaf spring element or pressure diaphragm element arranged nearthe base plate is displaceably-mounted with respect to a portion formedby longitudinal slots in a direction perpendicular to the travel axis ofthe transmission element. Preferably, a second measuring means isprovided for detecting a displacing movement of the lower leaf springelement or portion of the pressure diaphragm element. Said secondmeasuring means includes a sensor element, which detects a displacingmovement of the lower leaf spring element or portion of the pressurediaphragm element during a displacing movement of the transmissionelement along the longitudinal axis thereof or the travel axis of thedrive element. Likewise, a deflection of the transmission element can beestablished upon penetration of the indenter into the surface of thespecimen during the performance of a scratch resistance test.

The object underlying the invention is further achieved by a measuringarrangement for detecting measuring signals during a displacingmovement, in particular a penetration depth or a scanning movement, ofan indenter in a surface or onto a surface of a specimen, in which ameasuring table is provided on a base body or a base plate for receivinga specimen, as well as a handling means, in particular a stand receivinga measuring device that is transferred, via the handling means, into aposition for the placement of an indenter onto the specimen, wherein thedisplacing movement, for penetration of the indenter into the surface ofthe specimen, or the displacing movement, for scanning the surface ofthe indenter, is driven and performed by a measuring device according toone or more of the above-desired features of the embodiments.

Furthermore, the measuring arrangement preferably receives an opticaldetection means adjacent to the measuring device, which opticallycaptures and evaluates the point of penetration, the surface roughnessor, when performing the scratch resistance test, the introduced scratch.Here, the measuring table is preferably displaceable between themeasuring device and the optical detection means. Alternatively, themeasuring device and the optical detection means can be displaceabletowards the measuring table.

In addition, a displacing movement of the measuring table, in particularan axle located along a travel direction in the plane of the surface ofthe specimen, is driven by the control. Due to this control, a surfacecontour or roughness of the surface can thusly be detected upon placingthe indenter onto the surface of the specimen, with said specimenconstituting a starting position, and in a subsequent, controlleddisplacing movement. This can also be performed for a pre-scan forestablishing a scratch resistance. Likewise, a penetrating movement ofthe indenter can be driven during the displacing movement of themeasuring table towards the indenter, starting from the startingposition, in order to form a scratch. A post can for a scratchresistance test can also be driven starting from the starting position.

The object underlying the invention is furthermore achieved by a methodfor detecting measuring signals during a penetrating movement of anindenter into a surface of a specimen with a measuring device or duringa scanning movement of an indenter on a surface of a specimen, in whichthe specimen is positioned on a measuring table, and the measuringdevice is placed onto the specimen, in that a penetrating movement ofthe indenter is driven with a force-generation means, in which, with amagnetic force, i the penetrating movement of the indenter is driveninto the specimen or, for a scanning movement, is driven on thespecimen. This allows for a cost-effective configuration of the forcegeneration means. In addition, an exact driving of the indenter can beachieved, as the force generation means is independent of fluctuationsin temperature and has a small mass.

The restoring force of the leaf spring elements can be neglected in thiscase, or can be determined and considered depending on the travel pathof the indenter along the travel axis thereof. The initial force, withwhich the force generating means acts upon the indenter, during the feedmotion, up until placement upon the specimen, can, for example, beformed, on the one hand, by a force equilibrium between the restoringforces of the spring elements, and, on the other hand, by the displacingmovement produced by the magnetic force in direction towards theindenter.

Preferably, a first method step is provided for a hardness measuring ona surface of the specimen, in which the measuring device is movedtowards the specimen and, upon the placement of the measuring device,the feed motion is immobilized, wherein, subsequently, a displacingmovement of the indenter is driven, which indenter, in an initialposition, is set backwards inwardly with respect to an outer side of themeasuring device, until this indenter is resting on the specimen,wherein this position is forwarded, to the control device, as the zeroposition for the subsequent hardness measuring. A defined initialsituation for a measurement can thereby be achieved. In addition, theindenter is transferred out of a protected initial position into ameasuring position. The detection of the zero position of the indenter,in which said indenter rests on the surface of the specimen, isadvantageously detected by a first measuring means, which identifiesthat no change in path is specified, so that a signal is therebyforwarded to the control, in order to immobilize the feed motion of themeasuring device on to the specimen.

In addition, preferably a first method step is provided for a scratchresistance measurement, in which, prior to the indenter being placed onto the surface of the specimen, said indenter is applied with a feedforce, so that the indenter, with respect to a lower side of thehousing, freely protrudes to the outside. The measuring device issubsequently moved towards the specimen, and, upon placing of theindenter onto the specimen, the displacing movement of the measuringdevice is immobilized. Preferably, this position is, in turn, forwardedto the control as a zero position, for the subsequent measuring of thescratch resistance.

Another preferred embodiment provides that, starting from the zeroposition of the indenter, the force generation means is acted upon witha testing force, and a penetrating movement of the indenter into thesurface of the specimen is detected with a first measuring means.Through the change in path during the penetrating movement, as well asalso by knowing the applied testing force, the hardness of the specimencan be determined. At the same time, these measurement results can alsobe taken into account when measuring the scratch resistance.

Furthermore, it is preferably provided that a penetrating movement ofthe indenter is driven by a feed motion of the drive element of thedrive means, and that a transmission of force occurs, from the driveelement, onto the magnetic transmission element, or the indenter,respectively, by a magnetic transmission means.

In addition, it is preferably provided that the force, acting upon theindenter, is calculated or is detected by a fourth measuring means fromthe feed movement of the drive element, which is detected by the thirdmeasuring means, and that, by the first measuring means, the penetrationdepth of the indenter into the specimen is detected, and that, from thepenetration force calculated or detected by the third or the fourthmeasuring means, and the penetration depth detected by the firstmeasuring means, depending on the geometry of the indenter, at least thehardness of the surface of the specimen is identified. The fourthmeasuring means is preferably provided between the drive element of thedrive device and the magnetic pole provided by the drive element.

In order to determine a scratch resistance of the surface of thespecimen, the measuring table, with the specimen applied thereon, ispreferably displaced, during the penetrating movement of the indenter,in a direction perpendicular to the penetrating movement of theindenter, and a scratch is introduced into the surface of the specimen.Measuring signals regarding the penetration depth are, through a firstmeasuring means, detected depending on the time and the travel path.Furthermore, by means of a second measuring means of the measuringdevice, a deflection of the indenter, opposite the travel direction ofthe measuring table, is detected. In addition, a measuring force, actingupon the indenter, is forwarded, as a measuring signal, to the controldevice. Said measuring force can be determined from the feed motion ofthe drive element and the feed force of the indenter resulting from themagnetic transmission means into the surface. As an alternative, it canbe provided for this determination of the measuring force, thatmeasuring signals are detected by means of a fourth measuring means,wherein said fourth measuring means is positioned between a magneticpole of the magnetic transmission device and the drive element, whichaccommodates said magnetic pole. From these detected signals can beidentified the scratch resistance of a surface of the specimen.

Furthermore, additionally, a deflection of the indenter oriented at aright angle to the displacing movement of the measuring table isdetected by another measuring device, preferably during the introductionof a scratch into the surface of the specimen. Thereby, an assessmentregarding the surface of the specimen can additionally be made, and inparticular, a statement about the homogeneity of the material can beachieved.

In addition, the measuring device is placed on to the surface,preferably prior to the introduction of a scratch into the specimen, isdisplaced in a direction perpendicular to the place-on movement of thespecimen, and the surface is scanned. Signals are here detected by thefirst measuring device and are stored as a pre-scratch profile. Througha so-called pre-scan, the course of the surface of the specimen can beestablished, so that this further parameter can be taken intoconsideration in the subsequent determination of the scratch resistance.

In addition, performing a so-called post scan is provided for thedetermination of the scratch resistances. To that end, the measuringdevice is preferably placed on to the scratch after the scratch wasintroduced into the specimen, and the intender is displaced with themeasuring device in a direction perpendicular to the penetrationmovement of the specimen, that is, guided along in the scratch, and thedetected measuring signals are stored.

Another preferred configuration of the invention provides that the testpressure in the force generation means is kept constant during thescanning movement of the indenter. Here, the indenter, under unchangedconditions, can be guided along the surface of the specimen, wherein themagnetic transmission device is then so to say formed as a rigidactuator, so that the displacing movement acting upon the intender canbe directly transmitted, due to the surface roughness, alongside thelongitudinal axis of said intender and can be detected by at least thefirst measuring means.

The invention, as well as other advantageous embodiments and furtherdevelopments thereof, are described in greater detail and explained inthe following by means of the examples illustrated in the drawings. Thefeatures that can be taken from the description and the drawings can beused individually or in plural in any combination, according to theinvention. Shown are in:

FIG. 1 a schematic view of a measuring arrangement according to theinvention having a measuring device,

FIG. 2 a first perspective view of the measuring device of FIG. 1,

FIG. 3 a further perspective view of the measuring device according toFIG. 2,

FIG. 4 a schematic side view of the measuring device according to FIG.2,

FIG. 5 a schematic, enlarged view of a lower part of the measuringdevice according to FIG. 2 with a first measuring means,

FIG. 6 a schematic, enlarged view of an upper part of the measuringdevice according to FIG. 2 with a third measuring means,

FIG. 7 a further schematic side view of the upper part of the measuringdevice according to FIG. 6,

FIG. 8 a schematic, enlarged view of the measuring device with a secondmeasuring means,

FIG. 9 a schematic sectional view of an alternative embodiment of alower part of the measuring device according to FIG. 5,

FIG. 10 a perspective view onto a leaf spring element,

FIG. 11 a perspective view onto an alternative embodiment of leaf springelement with a holding device for the measuring device according to FIG.2,

FIG. 12 a schematic side view of an alternative embodiment of themeasuring device according to FIG. 2,

FIG. 13 a schematic side view of a further alternative embodiment of themeasuring device according to FIG. 2,

FIG. 14: a schematic view from below onto a pressure diaphragm elementof a holding device for the measuring device according to FIG. 13,

FIG. 15 a perspective view of a further alternative embodiment of themeasuring device according to FIG. 2,

FIG. 16 a further schematic view onto the alternative measuring deviceaccording to FIG. 15, and

FIG. 17 a schematic sectional view of the magnetic transmission deviceof the alternative measuring device according to FIG. 15.

FIG. 1 schematically illustrates a measuring arrangement 11. Such ameasuring arrangement 11 can be provided for testing mechanical and/orphysical properties of surfaces on specimens 14, such as for examplefilms, layers and/or coatings on objects. The measuring arrangement 11can, for example, be employed as a hardness measuring means, in which ahardness measurement is performed by penetration, by means of anindenter 41, of a measuring device 12. In addition, this measuringarrangement 11 with the measuring device 12 can be provided in order todetermine a scratch resistance of a film, a layer or a coating onobjects. CVD coatings or PVD coatings can be here tested with respect totheir scratch resistance, for example. Likewise, further micro scratchescan be detected or other deformation information from the surface can bedetected and analyzed. Likewise, this measuring arrangement 11, inparticular with the measuring device 12, also allows for a roughnessmeasuring of a surface of the specimen 14, without being thuslyaccompanied by a damaging of the surface of the specimen 14. In thiscase, the indenter 41 is placed on to the surface of the specimen 14 anddisplaced along the surface in order to scan the roughness of thesurface of the specimen 14.

The measuring arrangement 11 includes a common base body 16. Said bodycan preferably be formed of granite. A stand 17 is provided on the basebody, which stand receives the measuring device 12 on a cantilever 18.Said stand 12 includes a drive motor 19, by means of which the measuringdevice 12 is displaceable from an initial position illustrated in FIG. 1into a testing position 22, in which the intender 41 rests on a specimen14. The drive motor 19 can, for example, power the cantilever 18 for anup-and-down movement along a guide column 23 of the stand 12.

A measuring table 25 is additionally provided on the base body 16. Saidmeasuring table 25 comprises a measuring table receptacle 26, which isdriven at least in X direction according to arrow 27, in a displaceablemanner. The specimen 14 is placed on to the measuring table receptacle26 and fixed thereto.

The measuring arrangement 11 can furthermore include an opticaldetection means 29, which can likewise be arranged on the stand 17 oradvantageously, separate therefrom, on another stand 31. This opticaldetection means 29 can be positioned adjacent to the measuring device12. Here, the measuring table 25 or the measuring table receptacle 26 isconfigured to be displaceable in such a manner, that the specimen 14,after the introduction of a penetration location or a scratch intosurface of the specimen 14, is displaceable towards the opticaldetection means 29, in order that the penetration location or theintroduced scratch can be optically detected in the surface of thespecimen 14. Alternatively, a displacing movement of the measuringdevice 12 and of the optical detection means 29 relative to themeasuring table 25 can also be provided.

The measuring device 11 further includes a schematically illustratedcontrol 33, which includes a data processing means (not shown in greaterdetail here), a display device 35 and an input device 36. The control 33is, at least by signal lines, connected with the stand 17, the measuringdevice 12 and the measuring table 25. Preferably, the optical detectionmeans 29, and, if necessary, the stand 31 receiving the opticaldetection device 29 is likewise connected thereto.

For driving the measuring device 12, the measuring arrangement 11moreover comprises at least one control line, which is connected to thecontrol 33.

FIG. 2 illustrates a first perspective view of the measuring device 12according to the invention. FIG. 3 illustrates another perspective viewfrom below onto the measuring device 12 according to FIG. 2. FIG. 4illustrates a schematic side view of the measuring device 12 accordingto FIG. 2, to which reference is likewise made in order to set out thestructure of the measuring device 12.

The measuring device 12 includes a housing 47 with a base plate 51.Opposite said base plate, a cover element 52 is provided. Spacerelements 53 are provided between the base plate 51 and the cover element52. The side walls between the base plate 51 and the cover element 52,which close the housing 47, are not illustrated for the purpose ofclarity.

The base plate 51 comprises a recess 55, through which an indenter 41extends and can exit downwards, as is illustrated in FIG. 3. Theindenter 41 is received by a transmission element 42. Said elementprotrudes into an inner space of the housing 47. The transmissionelement 42 is preferably accommodated by a guide 57 within the housing47. By means of said guide 57, the transmission element 43 can be movedup and down along a longitudinal axis 43 of the transmission element 42.The longitudinal axis 43 of the transmission element 42 corresponds to alongitudinal axis 48 of the indenter 41.

The guide 57, which accommodates the transmission element 42, isarranged on a holding device 58 fastened to the base plate 51. The guide57 includes, for example, a first and second leaf spring elements 61, 62oriented in perpendicular to the longitudinal axis 43 of thetransmission element 42. The longitudinal axis 43 of the transmissionelement 42 is preferably situated in a travel axis 46 of a drive element96 of the drive device 45 or is oriented in parallel thereto. Theleaf-spring elements 61, 62 are preferably oriented in X-directioninside the housing, whereby the transmission element 42 is kept orientedin Z direction. Through these leaf-spring elements 61, 62, anup-and-down movement, or a travel movement along the Z axis of thehousing 47 is allowed for. According to a first embodiment, it isprovided that the leaf spring elements 61, 62 are formed from a thin,flat strip, in particular a spring steel. In order to reinforce theupper leaf spring element 61, for example, reinforcing elements 63 arefastened to an upper and lower side of the leaf spring element 61, 62.These reinforcing elements 63 can likewise be formed strip-shaped.Preferably, they are fixedly arranged on the leaf spring element 61 bymeans of a screw or a clipping connection. Alternatively, the upper leafspring element 61 can also be configured thicker, that is morereinforced, so that the reinforcing elements are dispensable.

The measuring device 12 furthermore comprises a force generation means44 which consists of a drive device 45 that is fastened to the coverelement 52, for example.

Moreover, the force generation means 44 includes a magnetic transmissionmeans 66, which comprises at least a first and a second magnetic pole67, 68. A first magnetic pole 67 is assigned to the drive means 45. Theat least one second magnetic pole 68 is arranged on an end of thetransmission element 42 opposite the indenter 41. The first and thesecond magnetic pole 67, 68 are located in a common longitudinal axis,in particular in a travel axis 46 of the drive element 96, which elementis preferably located in a Z axis of the housing. The first and thesecond magnetic pole 67, 68 are oriented to one another in such a mannerthat they are facing each other with a same pole. A repelling effect isthereby given between the magnetic poles 67, 68. The repelling effect orthe magnetic force increases with a reducing distance of the twomagnetic poles 67, 68 to one another. The magnetic poles 67, 68 arepreferably configured as permanent magnets. The magnetic transmissionmeans 66 allows for a contactless transmission of force from the driveelement 96 of the drive device 45 onto the indenter 41. This magnetictransmission means 66 can also be referred to as a magnetic spring.Through the magnetic poles 67, 68 facing towards one another in oppositepolarity a displacing movement is generated in a feed movement of thedrive element 96 onto the transmission element 42. However, no rigidcoupling is given, so that an excessive load in the componentsgenerating the displacing movement of the indenter 41 is prevented.

Reference is made to FIG. 5 for the purpose of further illustration ofthe transmission element 42 receiving the indenter 41, as well as thestructure of the holding device 58 and the configuration of the guide47.

The transmission element 42 is preferably formed as a tube. A receivingmeans 71 is provided on the upper end thereof, which receives the secondmagnetic pole 68. In this case, it can be a pot-shaped element,preferably from synthetic material. The magnetic pole 68 can, forexample, be glued-in or pressed-in and is guided laterally in thereceiving means 71. Preferably, the magnetic pole 68 is of cylindricaldesign. The longitudinal axis of the magnetic pole 68 is preferablyoriented to the longitudinal axis 43 of the transmission element 42.Similar applies for the first magnetic pole 67. The indenter 41 isprovided on the opposite end of the transmission element 42. Saidindenter is accommodated in an exchangeable manner by a fastening means72. In the configuration of the measuring device 12 as a hardnessmeasuring device, the fastening means 72 can merely be provided by meansof a latching or clipping connection, so that an axial securing of theindenter 41 in the fastening means 72 is provided. In the use of themeasuring device 12 for determining the scratch resistance, thefastening means 72 also comprises a radial clamping in addition to theaxial securing. Said securing can be provide by means of a threadedscrew or the like. The fastening means 72 can in particular beconfigured as a collet chuck system.

The lower end of the transmission element 42 plunges into the recess 55of the base plate 51, in a contact-free manner. An attachment ring 74 ispositioned in this recess 55, through which ring the indenter 41 isguided through freely and without friction, such that the tip thereofcan freely exit downwards. The tip of the indenter 41 is selecteddepending upon the measurement to be performed. Said tip can be in theshape of a pyramid or of a truncated cone. In the event of performing ascratch resistance measurement, the indenter 41 is oriented specificallywithin the fastening means 72.

A measuring probe 77 of a first measuring means 78 is provided at theinner end of the indenter 41. Said probe protrudes through an opening inthe transmission element 42 and into the transmission element 42. Thisfirst measuring means 78 is preferably configured as a distance sensorand fastened to the base plate 51. The adjusting of a distance of themeasuring probe 77 relative to the inner end of the indenter 51 ispossible by means of an adjustment assembly 79. By means of this firstmeasuring means 78, a distance of the indenter 41 to the measuring probe47 is detected, beginning from an initial position to a penetrationposition and forwarded to the control 33.

By the guide 57 or the two leaf spring elements 61, 62 parallelly spacedfrom one another, a guided up-and-down movement of the transmissionelement 42 and thusly of the indenter 41 along the Z axis or the travelaxis 46 can be achieved. The upper leaf-spring element 61 is held on theholding device 58 in a clamped manner. A fastening plate 81 is fastenedto a mounting block 82 by a releasable connection, in particular screwconnection, for example. A depression 83 can be provided for the definedalignment of the leaf spring element 61 in the mounting block 82, bymeans of which depression the leaf spring element 61 is aligned along anX axis of the housing 47.

The lower leaf-spring element 62 is mounted in the mounting block 82 bymeans of a clamping means 85. This clamping means 85 is subsequentlydescribed in greater detail in FIG. 8.

FIG. 5 furthermore shows a transport securing means 87 by means of tworods arranged on the holding device 58. The upper rod is arranged at avery small distance to the receiving means 71. The lower rod 87terminates, with very minimal distance, in front of the transmissionelement 42. This way, already small deflections are blocked duringtransport.

Furthermore, two U-shaped plates 88 are provided in the mounting block82 and oriented in opposite directions, which plates can secure acompensating element 89 in a somewhat horizontal orientation ororientation in X direction, during transport.

This compensating element 89 can be additionally provided. In theconfiguration of the measuring device 12 as a pure hardness measuringapparatus, this compensating element 89 is not required. a furtherstiffening can thereby be created for determining the scratchresistance, which counteracts a deflecting movement of the indenter 41.The compensating element 89 is rotatably-mounted in the mounting block82. Preferably, a strap mounting is provided, which allows for apivotable arrangement of the compensating element 89 about the Y axis inthe housing 47. An end 93 directed towards the transmission element 42preferably protrudes through an opening into the transmission element42. Another leaf spring element 94 acts on this end 93, the opposite endof which element being fixed to the upper end of the transmissionelement 42. This leaf spring element 94 can, in turn, be of reinforceddesign. Preferably, the compensating element 89 is of tubular design.

FIG. 6 illustrates the drive device 45 schematically and enlarged in afirst side view, and FIG. 7 illustrates it in a second side view,rotated by 90° C. compared to the first side view in FIG. 7. The drivedevice 45 comprises a first drive element 96, in particular configuredas a drive spindle. A receiving means 71 for receiving the firstmagnetic pole is provided at the lower free end of the drive element 95.Preferably, the receiving means 71 for the first and second magneticpoles 67, 68 are identical. The arrangements of the first and the secondmagnetic poles 67, 68 can also be inverted.

In each case one magnetic pole 67, 68 can be provided in the receivingmeans 71, which is, one the one hand, provided on the transmissionelement 42 and, on the other hand, on the drive element 96. In addition,the receiving means 71 can be configured such that multiple, individualmagnetic poles can be arranged therein. Just as well, the magnetic polescan, instead of an adhesive connection, be held by means of a latchingor clipping connection, e.g. by an additional locking element, thatengages on the receiving means 71.

The magnetic poles 67, 68 are advantageously of cylindrical design.Other geometries are also possible. Moreover, the magnetic poles 67, 68can also be configured as rings with an internal through bore.

A drive motor 97 is provided for driving a displacing movement of thedrive element 96 along the travel axis or the Z axis of the housing 47.An electric motor, in particular a servomotor, is advantageouslyprovided. This drive motor 97 powers a rotary drive 98, which connectsthe drive motor 97 with the drive element 96. The rotary drive 98 e.g.includes a toothed belt 99 that drives a pinion on a drive shaft of thedrive motor 97 and opposite on a rotatably-mounted spindle nut 101. Thespindle nut 101 is rotatably accommodated by means of a bearing 102. Thespindle nut 101 has a sleeve 103 provided thereon in arotationally-secured manner, which sleeve accommodates a component 104of a third measuring means 105 at an upper end. The third measuringmeans 105 is connected to the housing 47 in a stationary manner. Thethird measuring means 105 is preferably configured as a rotary encoderor incremental encoder, through which the rotation performed of thespindle nut 101 is determined.

A column guide 106 is provided for the rotationally-securedup-and-down-movement of the drive element 96. This column guide isfastened on the cover element 52 and includes a U-shaped guide column107.

Preferably, a fourth measuring means 110 is provided between themagnetic pole 67 and the receiving device 71, or between the receivingdevice 72 and the drive element 96, which means is preferably configuredas a force sensor. This second measuring means 110 detects the forceacting between the two magnetic poles 67, 68. This allows the provisionof another measuring parameter to be monitored, in order to establishmeasuring results. In particular, a monitoring and, as the case may be,a correction of the penetration force can be determined. The forcetransmitted on to the indenter 41 can be calculated by a feed movementof the drive element 96, the travel path of which is detected by thethird measuring means 105, due to the know magnetic force of the twomagnetic poles 67, 68. A comparison of the actually acting force ispossible by means of the fourth measuring means 110.

FIG. 8 illustrates the clamping means 85 in schematically enlargedillustration. The lower leaf spring element 62 is held on the endopposite the transmission element 42, in a clamped manner, by means oftwo clamping elements 112. These two clamping elements 112, in turn, areheld on the mounting block 82 by means of another leaf spring element113, with the leaf spring element 113 being oriented in the Z direction.This allows for a deflection movement of the lower leaf spring element62 in and opposite the X direction. Furthermore, the clamping element112 has a measuring vane 114, which plunges into a second measuringdevice 91. This measuring device 91, in turn, is configured as adistance sensor. A force or a displacing movement acting on the leafspring element 62 can be measured by the second measuring device 91, bymeans of the shifting of the vane 114. This force or travel movement istransmitted to the leaf-spring element 62 via the indenter 41 and thetransmission element 42. In particular when measuring the scratchresistance, this second measuring means 91 can detect another parameterregarding the deflection of the indenter 41.

FIG. 9 is a schematic section of a lower part of the measuring device 12according to an embodiment alternative to FIG. 5. This embodimentaccording to FIG. 9 mainly differs from the embodiment of FIG. 5 in thata vibration damping means 120 is assigned to the second magnetic pole68, for example. Instead of this vibration damping means 120 assigned tothe magnetic pole 68, a vibration damping means 130 also can be providedat an end of the compensating element 89 opposite the transmissionelement 42. A combination of the two is also possible. The vibrationdamping means 120, 130 fulfil the task of counteracting one or multiplelift-off movements of the indenter 41 directly after the indenter beingplaced on to a surface of the specimen 14. Preferably, so-called eddycurrent breaks are used.

The vibration damping means 120 is configured as an encasing 121, forexample, which is preferably formed as a tube portion. This encasingencloses the magnetic pole 68. The magnetic pole 68 is preferably atleast partially positioned inside the encasing 121, in an initialposition. Once a lift-off movement takes place in the direction of the Zaxis or the longitudinal axis 43, the magnetic pole 68 plunges into theencasing 121, whereby a counteracting magnetic force is increased. Theencasing 121 is preferably formed of a ferromagnetic material, inparticular copper. Preferably, the encasing 121 is adjustable in heightrelative to the magnetic pole 68. The encasing 121 can preferably bedisplaced in height along the spacer element 53.

The vibration damping means 130 is only illustrated in part. Thecompensating element 89 has a vane 131 provided thereon, formed of aferromagnetic material. This vane is positioned between two mutuallyspaced permanent magnets, in order to act as a magnetic eddy currentbrake then.

FIG. 10 is an enlarged schematic illustration of an alternativeembodiment of a leaf-spring element 61, 62. Said leaf-spring element 61,62 does not require a reinforcing element 63. Rather, the constructivedesign is selected such, that such an element can be dispensed with. Theleaf-spring element 61 comprises a clamping region 135 and a connectingregion 136, and a spacer portion 137 located therebetween. A flexurebearing 138 is formed between the clamping region 135 and the spacerregion 137 as well as between the spacer region 137 and the connectingregion 136. Said flexure bearing 138 is reduced in thickness withrespect to the clamping region 135, connecting region 136 and spacerregion 137. A hinge is formed thereby. Adjusting of the rigidity of theflexure bearing is on the one hand achieved with the reduce inthickness, as well as the design of the radiuses 139. In addition, oneor multiple slot recesses 141 can be provided, in order to form softerflexure bearings 138. Instead of a planar design, the spacer portion 137can also be configured as a frame or a supporting structure. Holes 142are provided for aligning the leaf spring element 61 on the holdingdevice, in order to secure-by-pin the clamping region 135 with themounting block 82. Opposite and on the connecting region 136 is provideda receiving hole 143, in which the transmission element 42 can bepositioned. The connecting region 136 and the transmission element 42are preferably connected to one another by an adhesive connection.

FIG. 11 illustrates an alternative embodiment of the guide 57 and theholding device 58. It is provided in this embodiment that the guide 57and the holding device 58 are in one piece. Through a machining of theguide 57 out of one workpiece body, e.g. through eroding or ultrafineprocessing, it is made possible for the clamping region 135 to beintegrally connected with the holding device 58, in particular themounting block 82, and nonetheless for the leaf spring elements 61, 62to be configured with the flexure bearings 138, the spacer portion 137and the connecting region 136. A supporting body 146 extends between theleaf spring elements 61, 62. Said body restricts a deflecting movementof the transmission element 42 along the longitudinal axis 43, 48 or inZ-direction. The other two, face-side ends of the connecting regions 136are fixedly connected with the transmission element 43, so that both anupward and downward movement—i.e. in and against the Z direction—isrestricted.

FIG. 12 illustrates a schematic side view of an embodiment of themeasuring device 12 alternative to the above described measuring means.This measuring device 12 is configured differently in terms of the drivedevice 45 compared to the structure in particular described in FIGS. 6and 7. The drive motor 97 of the drive device 45 is not providedoutside, but inside a base body 16 of the measuring means 12. That is,the drive motor 97 is arranged internally, that is, on a lower side ofthe cover element 52. Also, the drive element 96 is fastened internallyand on a lower side of the cover element 52. In this embodiment, thedrive element 96 is configured as a so-called telescopic spindle. Thistelescopic spindle comprises a central drive spindle driven by means ofthe rotary drive 98 via a toothed belt 99 by the drive motor 97. Thisachieves a telescopic extension movement of the telescopic spindle, sothat the receiving device 71 arranged at the lower, free end thereofwith the first magnetic pole 67 is moved towards the opposite magneticpole 68.

This embodiment of the measuring means 12 comes with the advantage of alower construction height. The rotary drive 98 located outside thehousing can be protected by means of a cover (not illustrated in greaterdetail here). FIG. 13 illustrates an embodiment alternative to FIG. 2 ofthe measuring means 12. This measuring means 12 comprises a guide 57 forthe transmission element 42 that differs from the above-describedexemplary embodiments. In this embodiment, the holding device 58preferably is of cylindrical design and receives respectively onepressure diaphragm element 151, 152 on the upper and lower ends. Due tothe parallelly-spaced arrangement of the pressure diaphragm elements151, 152, a displacing movement along the travel axis 48 is effectedunder the impact of the magnetic force via the magnetic transmissiondevice 66 or the second magnetic pole 67 on to the second magnetic pole68 arranged on the transmission element 42 by means of the receivingdevice 71. The indenter 41 is moved coaxially relative to the attachmentring 74 downwards or outwards. A penetration movement of the indenter 41in the measuring surface of the object to be measured. The pressurediaphragm element 151, 152 can be of wave-like design in across-section. When viewed in a top view, this means that concentriccircles are provided. The degree of freedom of the deflection movementor the deflection force along the travel axis 48 can be defined by meansof the number and the height of the waves. The pressure diaphragmelements 151, 152 are preferably made of a non-magnetic material. Saidelements consist of a thin, disc-shaped, resilient material.

The first measuring means 78 is provided on the transmission means, witha sensor element of the measuring means 78 being fixedly arranged on thetransmission element and the complementary sensor element of themeasuring means 78 being fixedly arranged on the holding device 58. By adisplacing movement along the travel axis 48, the distance between thetwo sensor elements is changed, thereby allowing a precise determinationof the travel path. This first measuring means 78 operates similarly tothe above described, first measuring device 78.

Preferably, a second measuring means 91 is arranged on the transmissionelement 42. The second measuring means 91 likewise comprises a sensorelement directly on the transmission element 42 and, adjacent thereto, asecond sensor element arranged on the holding device 58. A deviation inthe deflection of the indenter 41 during a travel movement in the Xdirection or opposite the X direction can be detected by means of thissecond measuring means 91. The configuration of the second measuringmeans 91 corresponds to the measuring means 91 described in FIG. 9.

FIG. 14 is a schematic illustration from below on to the lower or thesecond pressure diaphragm element 152, which is oriented close to theindenter 41. The holding device 58 receives the pressure diaphragmelement 152 preferably in a clamped manner. The concentric waves of thepressure diaphragm element 152, also provided in the pressure diaphragmelement 151, are illustrated in a dashed manner. Furthermore, this lowerpressure diaphragm element 152 comprises, in contrast to the upperpressure diaphragm element 151, two longitudinal slots 152 spacedparallel from one another. The longitudinal slots 152 are oriented inthe X direction, or extend parallelly to the X axis, respectively. Thisis why the pressure diaphragm element 152 is configured to be soft orresilient along the Y axis, and rigid in the X axis. As a result, adeflection of the indenter 41 in the X direction can be detected duringthe measuring of the scratch resistance.

In the embodiment according to FIG. 13, similar to the second measuringmeans 91, another measuring means can be provided on the transmissionpin 42, arranged offset by 90°. This way, a deflection movement of theindenter 41 can be detected in the Y-direction.

Reference is made in the following to the above-described embodimentsand alternatives.

FIG. 15 illustrates a first perspective view of another embodimentalternative to the embodiment of FIG. 2 of the measuring device 12. FIG.16 shows another perspective view of the alternative embodiment of themeasuring device 12 according to FIG. 15.

This measuring device 12 differs from the first embodiment according toFIG. 2 in that the drive device 45 of the force generation means 44 isconfigured differently. For the purpose of better illustration, FIG. 17shows a schematic sectional view of this alternative embodiment of thedrive device 45.

The drive device 45 of this alternative embodiment is arranged on thehousing 47, in particular the cover element 52. The drive motor 97powers a drive element 96 formed by two toothed racks 161, 162 orientedin parallel to one another. This pair of toothed racks 161, 162 ispowered by a drive wheel 163, which wheel is, in turn,rotatively-connected with the drive motor 97. Said drive wheel 163 ispreferably provided directly on the drive shaft of the drive motor 97.Alternatively, a gear mechanism for reduction or transmission can beprovided therebetween. This drive wheel 163 at the same time powers bothtoothed racks 161, 162. This induces an opposite displacing movement ofthe toothed racks 161, 162.

The rotary movement of the drive shaft of the drive motor 97 or of thedrive wheel 163 can be detected or decoded in a simple manner, so thatthereupon, due to the fixed geometric relations of drive wheel 163 andtoothed rack 161, 162, an exact detection and driving of the travel pathof the permanent magnets of the first magnetic pole 67 is made possible.

The displacing movement of the toothed racks 161, 162 takes place alonga travel axis 46, which axis is oriented perpendicularly to the travelaxis 48 of the transmission element 42 or the indenter 41. In theexemplary embodiment, the travel axis 48 is thus oriented in Zdirection—that is, in the vertical—and the travel axis 46 is oriented inthe X/Y plane, respectively the horizontal.

The drive element 96 is displaceably accommodated by means of a guide165. The guide 165 preferably consists of two guide rails 166 orientedin parallel to one another, guiding one or multiple displaceablecarriages 167. In each case one toothed rack 161, 162 is arranged on thecarriage(es) 167.

It provided in this alternative embodiment for the first magnetic pole67 to be formed of two separate permanent magnets. Alternatively, alsomultiple, separate permanent magnets can be provided. The secondmagnetic pole 68 is adapted to the first permanent magnet 67 in terms ofthe number of the separate permanent magnets. The receiving means 71 onthe transmission element 42 comprises two separate depressions, which,at a same distance to the travel axis 48, receive the permanent magnetsfor forming the second magnetic pole 68.

The receiving device 71 for receiving the first magnetic pole 67 isformed by two receiving elements 71 arranged separately to one another.Each receiving element 71 for the permanent magnet is arranged on atoothed rack 161, 162, wherein these are in each case oriented such,that the receiving means 71 is positioned between the two toothed racks161, 162 extending in parallel.

In an initial position of the measuring device 12, the two permanentmagnets of the first magnetic pole 67 are spaced from one another insuch a way, that said magnets do not or almost not impart any magneticforce on to the oppositely arranged permanent magnets of the secondmagnetic pole 68. For driving the penetrating movement of the indenter41, a rotary movement is induced into the drive wheel 73 by means of thedrive motor 97, through which wheel the two toothed racks 161, 162 aredriven synchronously and displaced oppositely to one another. The twopermanent magnets of the first magnetic pole 67 are simultaneously movedtowards one another. In a position of the permanent magnets of the firstmagnetic pole 67 relative to those of the second magnetic pole 68, as isillustrated in FIG. 17, only a small magnetic force is transmitted,because of the small degree of overlap. The maximum transmission offorce exists if the permanent magnets of the first magnetic pole 67 aremoved towards one another in such a way until they are positioned to becongruent with the permanent magnets of the second magnetic pole 68. Thedegree of overlap is driven by a control of the measuring device 12, inparticular depending on a penetration movement or depending on thetravel path of the indenter 41.

Alternatively to the above displacing movement of the permanent magnetsof the first magnetic pole 67 for driving the penetration movement ofthe indenter 41, it can also be provided that the permanent magnets ofthe first magnetic pole 67 are located adjacently next one another in aninitial position, and that the permanent magnets of the second magneticpole 68, at a large distance, are located outside the two permanentmagnets of the first magnetic pole 67, which are arranged so as todirectly neighbor one another. In this case, a displacing movement ofthe permanent magnets of the first magnetic pole 67 is driven to leadthem away from one another.

In the embodiments illustrated in FIGS. 15 to 17, the travel axis 46 ise.g. oriented according to the coordinate system illustrated in FIG. 2.Alternatively, this travel axis 46 can also be oriented in anotherdirection within the XY plane, in particular in the X axis.

According to another embodiment (not shown in greater detail) of themeasuring device 12 according to FIG. 15, it can also be provided, thatthe first and the second magnetic poles 67, 68 consist only of onepermanent magnet. Therefore, driving of only one drive element havingthe first magnetic pole 67 fixed to it, is sufficient in order todisplace said pole along the travel axis 46 perpendicular to the travelaxis 48 of the transmission element.

Furthermore, it can alternatively be provided, that e.g. more than twopermanent magnets are provided per magnetic pole 67, 68. Said magnetscan then be arranged on a circumference of a circle. This way, multiplepermanent magnets of the first magnetic pole 67 can be brought inpartial or complete overlap with respect to the respective permanentmagnets of the second magnetic pole 68, by means of a pivot movement.

Incidentally, the above-described embodiments and alternatives applydirectly or analogously also for the above-described measuring device 12according to FIGS. 15 to 17.

The above-described measuring devices 12 allow both for measurement inan upright position, as is illustrated in the Figures, as well as anoverhead measuring.

Performing of the hardness measuring of a surface of the specimen 14with a measuring device 12 in a measuring arrangement 11 is effected asfollows:

After having placed the specimen 14 on to the measuring table 26, themeasuring device 12 is positioned above the specimen 14 by means of thestand 17. In this initial position of the measuring device 12, theindenter 41 is in an initial position, that is, the indenter 41 is setback relative to an underside of the base plate 51 of the housing orrelative to a place-on surface 76 on the attachment ring 74 fixed to thehousing 47. Subsequently, the measuring device 12 is moved towards thesurface of the specimen 14 by means of the at least one motor 19 of thestand 17. When placing on a place-on surface 76 of the attachment ring74 of the measuring device 12 on to the specimen 14, the feed movementis immobilized. Subsequently the force generation means 44 is activated.The drive means 45 actuates the drive element 96, so that the latterperforms a displacing movement along the travel axis 46 in the directiontowards the indenter 41. Due to the magnetic transmission device 66, themagnetic pole 67 is moved towards the magnetic pole 68. Due to therepelling magnetic force of the two magnetic poles 67, 68, the feedmovement along the travel axis 46 is transmitted contactless from themagnetic pole 67 on to magnetic pole 68. By means of this guide 57, theindenter 41 is moved along the travel axis 46, which is preferablycongruent with the longitudinal axis 43 of the transmission element 42downwards and towards the surface of the specimen 14. Once the indenter41 comes to rest on the surface of the specimen 14, the first measuringmeans 78 does not determine any change in distance, so that the feedmovement of the drive means 45 is immobilized via the control 33. Thisinitial position is forwarded to the control 33 as zero position.Subsequently, another feed movement of the drive element 96 is driven bymeans of the control 33, thereby driving a penetration movement of theindenter 41 into the specimen 14. The first measuring means 78determines the penetration path. The test force can be determined fromthe feed movement of the drive element 96, which movement is detected bya third measuring means 105. Alternatively and/or for comparison, thetesting force acting on the indenter 41 can also be determined by meansof the fourth measuring means 110. From these measured values and thegeometry of the indenter 41, the hardness of the surface of specimen 14can be determined. The indenter 41 can be in the form of a sphere or apyramid. This indenter preferably consists of diamond, topaz, corundumor quartz.

Subsequently, the measuring device 12 is lifted-off the specimen 14and/or the drive element 96 is driven to perform a displacing movementoppositely to the indenter 41. This can be effected simultaneously, orone after the other. The measuring device 12 is returned to an initialposition. Using the guide 47, the indenter 41 is likewise set back intoan initial position with the transmission pin 42.

Subsequently, after having introduced a penetration location into thespecimen 14, a mapping of the penetration location can be established bymeans of the optical detection device, and an optical assessment can beperformed as well.

For determining the scratch resistance of a surface of a specimen 14,the specimen 14 is positioned on the measuring table 25 or on ameasuring table receptable 26 of the measuring table 15. Above thespecimen 14 the measuring device 12 is positioned, so that an indenter,by means of a feed movement perpendicular to the surface of the specimen14, can be moved towards said specimen. The drive device 45 is actuated,so that the drive element 96 performs a feed movement along the travelaxis 46 in the direction towards the indenter 41. This feed movement istransformed into a displacing movement of the indenter 41 by means ofthe magnetic transmission device 66, so that the indenter is transferredfrom an initial position into an operating position. In this operatingposition, the indenter 41 protrudes with respect to a lower side of thebase plate 51 of the housing 47 or of an attachment ring 47 arranged inthe recess 55 of the baseplate 51 of the housing 47.

Thereafter, the measuring device 12 is moved towards the specimen 14.This is e.g. effected by means of the motor 19. Once the indenter 41 isplaced on the surface of the specimen 14, the feed movement isimmobilized. This contact is detected by the first measuring means 78.The measuring means 12 is arranged in a starting position to thespecimen 14. This starting position is stored in the control 33 as thezero position. This starting position can be intended for a so-calledpre-scan to determine the scratch resistance. Said starting position canalso be intended for a measuring of the surface roughness of thespecimen.

Based on this starting position, first a pre-scan can be performed, i.e.the surface of the specimen 14 is scanned along a predetermineddisplacement path of the surface of the specimen 14. The displacementpath is oriented tangentially or rectangularly to the specimen 14, forexample along the X axis. Preferably, the measuring device 12 isimmobile and the measuring table 25 is displaced by means of a motor 28in the direction of arrow 27 according to FIG. 1, thereby scanning theposition of the surface and the contour of the surface and storing themeasuring signals as pre-scratch profile data, also referred to aspre-scan. Thereafter, the measuring device 12 is lifted-off the specimen14. The measuring device 12 and the measuring table 25 are positionedback into the starting position. Thereupon, again by means of thecontrol 33, the same displacing movement as with the pre-scan accordingto arrow 27 is driven using the motor 28. Simultaneously with thisdisplacing movement, drive means 45 is driven, so that the indenter isapplied with a testing force, whereby the indenter 41 increasinglypenetrates into the surface of the specimen 41 during the displacingmovement of the measuring table 25. This penetration movement isdetected by the first measuring device 48. At the same time, the appliedtesting force is calculated using the third measuring device 105. Inaddition, the actually applied testing force can be detected by means ofthe fourth measuring means 110. In addition thereto, a deflection of theindenter 41 in the travel direction according to arrow 27 is detected bymeans of the second measuring means 91. At the end of the predefineddisplacing movement after the application of the predefined testingforce, the measuring device is, in turn, lifted-off the specimen 14. Themeasuring signals detected during the introducing of a scratch arestored by the control 33 and assessed in order to determine the scratchresistance.

The measuring device 12 and the measuring table 25 can again be returnedinto the starting position. Thereafter, a so-called post-scan can takeplace. The indenter 41 is positioned in the scratch. Again, a displacingmovement of the measuring table 25 is effected according to arrow 27,whereby the indenter 41 is guided along the scratch and into thescratch. Again, a travel movement of the measuring table 25 according toarrow 27 takes place, thereby guiding the indenter 41 along the scratchand in the scratch. During the displacing movement of the indenter 41 inthe scratch, the measuring signals are again detected by the firstmeasuring means 78 and at least the second measuring means 91. Inaddition thereto, a deflection of the indenter in Y-direction, i.e. in adirection perpendicular to the X-direction in the plane of the surfaceof the specimen 14, can be detected during the pre-scan, theintroduction of the scratch and/or the post-scan by means of anothersensor of another measuring means.

After the introduction of the scratch and/or after the post scan, theoptical detection means 29 can detect the scratch and additionally allowfor an optical evaluation.

In order to measure the surface roughness of the specimen 14 thestarting position is taken again, just as with measuring the scratchresistance. Starting from this starting position, the indenter 41 ismoved along a predetermined displacement path on the surface of thespecimen 14. The displacement path is oriented tangentially orrectangularly to the specimen 14 and along the X axis. In this case, themeasuring device 12 can be immobilized and the measuring table isdisplaced in the direction of arrow 27 by means of a motor 28.Alternatively, the measuring table can be immobile and the measuringdevice 12 is displaced. Just as well, a relative movement can beeffected between these two. The displacement movement of the indenter 41along the longitudinal axis 48 caused by the surface roughness of thespecimen 14 is detected by the first measuring means 78 and assessed bythe control 33. After the scan of a predetermined displacement pathalong the surface of the specimen 14, the measuring device 12, in turn,is lifted-off the specimen 14.

We claim: 1-39. (canceled)
 40. A measuring device for detectingmeasuring signals during a penetration movement of an indenter into asurface of a specimen, for measuring the hardness, or for determiningthe scratch resistance of the surface of the specimen or for detectingmeasuring signals during a scanning movement of the indenter on thesurface of the specimen, with a housing comprising a force-generationmeans which is operatively-connected with an indenter for generating adisplacing movement of the indenter along a travel axis of the indenter,and which drives a penetrating movement of the indenter into the surfaceto be tested of the specimen or which positions the indenter on thesurface of the specimen for scanning, and with at least one firstmeasuring means for measuring the penetration depth into the surface ofthe specimen or for measuring a displacing movement of the indenteralong its travel axis during a scanning movement of the indenter on thesurface of the specimen, wherein the force generation means comprises adrive device and a magnetic transmission device and the magnetictransmission device comprises a first magnetic pole and a secondmagnetic pole, which are arranged at a distance to one another and whichare oriented with the same poles to one other, wherein the firstmagnetic pole is connected with the drive device that drives adisplacing movement of the first magnetic pole along a travel axis,which is located in the axis of the penetration movement of the indenteror parallel thereto, or which is located perpendicular to the axis ofthe penetration movement of the indenter, the second measuring pole ofthe transmission device is provided on a transmission element whichreceives the indenter on the opposite end thereof, wherein thetransmission element is displaceably guided inside the housing along atravel axis, which axis preferably is perpendicular to a base plate ofthe housing or is located in the axis of the penetrating movement of theindenter, and a travel movement driven by the drive device istransmitted on to the indenter by means of a magnetic force of themagnetic transmission device.
 41. The measuring device according toclaim 40, wherein by a displacing movement of the first magnetic pole inthe direction towards the second magnetic pole, the displacing movementof the indenter in the direction towards the specimen for a penetrationforce into the specimen or a contact force on the specimen for scanningthe surface of the specimen is adjustable.
 42. The measuring deviceaccording to claim 40, wherein the transmission element is displaceablyaccommodated in the housing by means of a guide arranged on a holdingdevice, and the guide comprises at least two resilient elements spacedfrom one another, which displaceably guide the transmission element inthe travel axis of the drive device and wherein the guide is releasablyheld in the holding device, or that the guide is integrally connectedwith the holding device, wherein the holding device and the leaf-springelements integrally arranged thereon.
 43. The measuring device accordingto claim 40, wherein the housing comprises a base plate with a recess,and the displacing movement of the indenter is aligned with thelongitudinal axis of the recess, and the indenter, which is provided atthe lower end of the transmission element, is positionable, from aninitial position inside the recess or inside an attachment ring arrangedin the recess, with respect to an outer side of the base plate in adrive position protruding with respect to an outer side of the baseplate and wherein the guide holds the transmission element with theindenter arranged thereon in an initial position, in which the indenteris arranged set-back inwardly with respect to a lower side of thehousing that is oriented towards the specimen.
 44. The measuring deviceaccording to claim 40, wherein the first measuring means is provided onthe baseplate of the housing adjacent to the indenter, which meanscomprises a measuring probe which is assigned to an internal end of theindenter.
 45. The measuring device according to claim 40, wherein thedrive device is provided on a cover element of the housing, whichcomprises at least one drive element displaceable along the travel axis,which is located in the travel axis of the indenter or in parallel tothe travel axis of the indenter, and the drive element receives thefirst magnetic pole at an end directed towards the transmission element.46. The measuring device according to claim 45, wherein the driveelement is guided, as a drive spindle with a guide provided on thehousing, in a manner secured against rotation, or that the drive elementis configured as a telescopic spindle and that the drive element isconnected with a rotary drive driven by a drive motor.
 47. The measuringdevice according to claim 40, wherein the travel axis of the driveelement is oriented perpendicular to the travel axis of the indenter,and the drive element drives a simultaneous displacing movement of twoor more permanent magnets forming the first magnetic pole, which aretransferrable to a partially overlapping position or to a congruentposition with respect to a corresponding number of permanent magnetsforming the second magnetic pole, and the transmission element comprisesa receiving device, which, at the same distance to the travel axis ofthe transmission element, receives at least two permanent magnets forforming the second magnetic pole.
 48. The measuring device according toclaim 47, wherein the drive element is formed by a pair of toothedracks, which is actuatable with a rotary drive perpendicular to thetravel axis of the indenter and which is displaceable along guide rails,and respectively one permanent magnet for forming the first magneticpole is provided in a manner facing the opposite toothed rack.
 49. Themeasuring device according to claim 45, wherein a drive movement of thedrive element is monitored by a third measuring means and a fourthmeasuring means, is provided between the drive element and the firstmagnetic pole arranged thereon.
 50. The measuring device according toclaim 40, wherein a vibration damping device is assigned to the secondmagnetic pole arranged on the transmission element and wherein thevibration damping device is formed as an enclosure made of aferromagnetic material, which surrounds the second magnetic pole and, inan initial position of the indenter, the second magnetic pole is atleast partially plunged in the enclosure.
 51. The measuring deviceaccording to claim 40, wherein a compensating element is providedbetween the two leaf spring elements spaced in parallel from oneanother, which element is pivotably mounted on the holding device andthe compensating element protrudes into the transmission element with anend thereof, on which a leaf spring element is provided that extends inthe direction towards an end of the transmission element that receivesthe magnetic pole and is fixed thereto.
 52. The measuring deviceaccording to claim 51, wherein the compensating element is mounted onthe holding device by means of a clamping means.
 53. The measuringarrangement for detecting a penetration depth in a surface of aspecimen, for detecting the scratch resistance of a surface of aspecimen, or for detecting a surface roughness of a surface of aspecimen, comprising a measuring table for receiving the specimen, ahandling means for transferring a measuring device from an initialposition into a measuring position, a base body, on which at least themeasuring table and the handling means is provided, a control fordriving and performing a measurement with the measuring device on thespecimen, which drives at least a placing movement of an indenter of themeasuring device on to the specimen with the handling device, whereinthe penetration movement of the indenter into the surface of thespecimen or the scanning movement of the indenter on the surface of thespecimen is provided with the measuring device according to claim
 1. 54.The measuring arrangement according to claim 53, wherein the opticaldetection means is arranged adjacent to the measuring device on the basebody, wherein the measuring table is displaceable between the measuringdevice and the optical detection means, or the measuring device and theoptical detection means are displaceable relative to the measuring tableand wherein a displacing movement of the measuring table along an axislocated in the plane of the surface of the specimen, is driven by thecontrol.
 55. A method for detecting measuring signals during apenetration movement of an indenter into a surface of a specimen of ameasuring device, or during a scanning movement of an indenter on asurface of a specimen, in which the specimen is positioned on ameasuring table and the measuring device is placed on to the specimen,in an initial position, in which the penetrating movement or thescanning movement of the indenter is driven with the force generationmeans, which comprises a drive device and a magnetic transmissiondevice, wherein the magnetic transmission device comprises a firstmagnetic pole and a second magnetic pole, which are arranged at adistance to one another and which are oriented with the same poles toone other, in which a feed movement of the driven device, using themagnetic force, is driven for the penetrating movement of the indenterinto the specimen, or in which the feed movement of the driven device,using a magnetic force, is driven for the scanning movement of theindenter on the specimen.
 56. The method according to claim 55, whereinfor measuring the hardness of the surface of the specimen, in a firstmethod step, the measuring device is moved towards the specimen, thatwhen placing the measuring device on to the specimen, the feed movementis immobilized, that a displacing movement of the indenter is drivenuntil the indenter rests on the surface of the specimen, and thisposition is forwarded to the control as a zero position for thesubsequent hardness measurement or wherein for scratch-resistancemeasurement of the surface of the specimen, in a first method step,prior to the measuring device being placed on to the surface of thespecimen, the indenter is applied with a displacing movement, so thatthe indenter freely protrudes with respect to a lower side of thehousing, that the measuring device is moved towards the specimen and isimmobilized when the indenter is placed on to the specimen, and thisposition is forwarded to the control as a zero position for thesubsequent scratch resistance measuring and that during the penetrationmovement of the indenter in the specimen, driven by the magnetic forcefor the scratch-resistance measurement, the measuring table is displacedin a direction perpendicular to the penetrating movement of the indenterand a scratch is introduced into the surface of the specimen, and viathe measuring signals of the first measuring means for the penetrationdepth and the measuring signals of at least one further, secondmeasuring means assigned to the indenter, a deflection of the indenteralong the displacement direction of the specimen as well as thecalculated force by the detected feed movement of the drive element withthe third measuring means or the detected measuring signals of thefourth measuring means are detected and evaluated.
 57. The methodaccording to claim 55, wherein the force generation means is appliedwith a testing force and that a penetrating movement of the indenterinto the surface of the specimen is detected at least with a firstmeasuring means.
 58. The method according to any one of claim 55,wherein the force from the feed movement that acts on the indenter,which is detected by third measuring means, is calculated, or detectedby a fourth measuring means, and that the penetration depth of theindenter into the specimen is detected by the first measuring mean, andthat the hardness of the surface of the specimen is determined from thecalculated or detected penetration force by the third or fourthmeasuring device and the detected penetration depth through the firstmeasuring means depending on the geometry of the indenter.
 59. Themethod according to claim 56, wherein prior to the introduction of thescratch in the specimen, the measuring device is placed on to thesurface of the specimen and is displaced in a direction perpendicular tothe place-on movement of the specimen, and the measuring signalsdetected by the first measuring means are detected and stored aspre-scratch profile data and/or wherein the after the introduction ofthe scratch into the specimen, the measuring device is placed in thescratch, and the intender with the measuring device is displaced in adirection perpendicular to the place-on movement of the specimen, andthe signals detected by the measuring device are detected along thedisplacing movement of the indenter in the scratch, and are stored aspost-scratch profile data.